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NanoGap
Stanford Reference:
01-227
Abstract
A method of fabricating a variable capacitive device for micromachined sensors and actuators. A critical optimization of these capacitors for both sensing and actuation is achieved by maximizing the capacitance change with gap width or overlap area. This process can be used to build simple facing capacitors, integrated capacitors, and the differential inter-digitated capacitors.
Applications
MEMS
Sensors
Actuators
Capacitors
Advantages
Significantly finer gap width is achieved through this method compared to common etched process.
Innovators & Portfolio
Thomas Kenny
Markus Lutz
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Aaron Partridge
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Patent Status
Published Application: 20040209435
Published Application: WO2004095540
Issued : 7,172,917 (USA)
Date Released
12/2/2004 12:00
Licensing Contact
Mona Wan, Senior Licensing Manager for Special Projects
650-498-0902 (Business)
Request Info
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Related Keywords
MEMS: bioMEMS
sensors
capacitor
MEMS: MEMS
