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Swiss Cross Tuning Fork Resonator
Stanford Reference:
04-260
Abstract
A novel design for a cross-shape micromechanical resonator that consists of an array of devices suited for integrated single chip frequency references, filter, and sensors. The sensing electrodes in the resonator are independently accessible, while providing fully differential driving and sensing mechanism. The invention provides a feasible and economic solution to decrease the motional resistance and to increase the output signal for fabricating a high frequency micromechanical resonator with enhanced linearity.
Applications
Integrated single chip frequency references, filters and sensors
Advantages
Lower motional resistance and higher output signal compared to current resonator
Simple fabrication process
Higher power handling capability
Enhanced linearity performance of the resonator
High quality factor
Innovators & Portfolio
Rob Candler
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Wilhelm Frey
Markus Lutz
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Volker Materna
Zhiyu Pan
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Aaron Partridge
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Gary Yama
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Patent Status
Published Application: 20070013464
Issued : 7,319,372 (USA)
Date Released
3/27/2008 12:00
Licensing Contact
Mona Wan, Senior Licensing Manager for Special Projects
650-498-0902 (Business)
Request Info
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Related Keywords
resonators
sensors
MEMS: MEMS
